Reporter:

Matt Gordon PhD (Professor, Department of Mechanical Engineering, University of Arkansas, Fayetteville, Arkansas, USA)

Title:

Characterization of Alumina Thin Films for Cutting Tool and Bio-Medical Applications

Alpha alumina has many chemical and mechanical properties that make it an ideal candidate for cutting tool and bio-medical applications. We have successfully deposited low-temperature (480C) alpha-alumina with a chrome template layer, and low-temperature (480°C) mixed-phase alumina coatings without a chrome template layer using an AC inverted cylindrical magnetron sputtering system. The resulting films are strongly dependent on growth conditions. We deposited films at powers ranging from 4 to 6kW, pressures ranging from 2 to 8 mTorr, with and without substrate bias (DC and pulsed), and oxygen partial pressures ranging from 35 to 75%. Thirty-nine total runs were performed and several substrates were used (silicon, stainless steel, and a titanium alloy). Analyses of each film included XRD, SEM and TEM. Films were also tested for corrosion resistance, wear, and protein adsorption for bio-medical applications involving surgical cutting instruments and surgical implantation devices. Results correlating plasma growth conditions using optical emission spectroscopy, Langmuir probe, and Residual Gas Analysis will also be presented.

Time:

14:00, 15 Oct 2009

Place:

The third flood Meeting Room, Building R